MSE 404 TM2 – Thin Film Mechanical Properties

The objective of this course is to provide lab experience to students in Thin Film Processing and Characterization while applying lessons from previous courses on good experimental practices, data analysis, and professional presentation.  The course is organized around a set of experimental modules performed in laboratory sessions, problem-solving, and student presentation/report.  Students should read relevant background materials before starting each experimental module.  Instructors are available for guidance, but students are encouraged to proactively problem solve and accomplish the tasks.

Syllabus:
The course introduces seniors and new graduate students to fabrication, analysis, and mechanical properties of thin film materials through hands-on experiments.  The course covers both the principles and practice of: Measurements of key properties including film thickness, microstructure, optical refractive indices, and thin-film stress.  Methods to optimize the film microstructure and engineering properties via the growth technique are emphasized.
* Deposition of thin film materials by vacuum evaporation, sputtering and plasma assisted processes;
* Modification of mechanical properties by thermal reaction, surface treatment, etc.;
* Measurements of key properties including film thickness, microstructure, optical refractive indices, and thin-film stress.  Methods to optimize the film microstructure and engineering properties via the growth technique are emphasized.

Detailed Syllabus: Syllabus MSE 404 TM2 Spring 2026

Course materials, including lecture notes and lecture recordings will be made available through our course Canvas website at https://canvas.illinois.edu/courses/69995

Contact Information:

Instructor:
Professor Axel Hoffmann can be reached via email at: axelh@illinois.edu
Office hours: Anytime during lab hours or via prior appointment.

TAs:
Bobby Kaman, kaman3@illinois.edu
Zhixin Zhang, zhixin2@illinois.edu

Discussions and announcements related to course material will be facilitated by using Canvas